Patent Assignment
Reel/Frame 066886/0464
Assignment of Assignor's Interest
Recorded: 2024-03-25
Pages: 3
Assignor
HIRAYAMA, MASAKI
Executed: 2024-02-28
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus