Patent Assignment
Reel/Frame 066965/0532
Assignment of Assignor's Interest
Recorded: 2024-04-01
Pages: 5
Assignors
WU, XUSHENG
Executed: 2021-05-19
LIU, CHANG-MIAO
Executed: 2020-07-21
SHANG, HUILING
Executed: 2020-07-23
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Isolation Structures in Multi-Gate Semiconductor Devices and Methods of Fabricating the Same