Patent Assignment
Reel/Frame 066985/0231
Assignment of Assignor's Interest
Recorded: 2024-04-02
Pages: 10
Assignors
TERUUCHI, SATORU
Executed: 2023-11-20
HIROSE, JUN
Executed: 2024-01-31
NAGASEKI, KAZUYA
Executed: 2023-11-20
HIMORI, SHINJI
Executed: 2023-12-26
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Monitoring System, Plasma Monitoring Method, and Monitoring Device