Patent Assignment
Reel/Frame 067004/0925
Assignment of Assignor's Interest
Recorded: 2024-04-04
Pages: 4
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Transfer Device Including Housing Provided with Fan