Patent Assignment
Reel/Frame 067271/0240
Assignment of Assignor's Interest
Recorded: 2024-04-30
Pages: 3
Assignee
AXUS TECHNOLOGY, LLC
7474 WEST CHANDLER BOULEVARD, CHANDLER, ARIZONA, 85226
Covered Property
(1)
Method and Apparatus for in-Situ Monitoring of Chemical Mechanical Planarization (Cmp) Processes
Application:
17/838,829 →
Publication:
US 2022/0395956
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.