Patent Assignment
Reel/Frame 073852/0903
Nunc Pro Tunc Assignment
Recorded: 2026-01-15
Pages: 14
Assignor
AXUS TECHNOLOGY, LLC
Executed: 2026-01-14
Assignee
ASM AMERICA, INC.
3440 EAST UNIVERSITY DRIVE, PHOENIX, ARIZONA, 85034
Covered Properties
(43)
Atmospheric Plasma in Cmp Pad Optimization
Application:
62/476,041 →
Planarized Membrane and Methods for Substrate Processing Systems
Planarized Membrane and Methods for Substrate Processing Systems
Application:
62/582,187 →
Cmp Machine with Improved Throughput and Process Flexibility
Application:
15/947,510 →
Publication:
US 2018/0311784
Cmp Machine with Improved Throughput and Process Flexibility
Application:
17/457,871 →
Publication:
US 2022/0088744
CMP machine with improved throughput and process flexibility and offline consumables preparation
Application:
62/602,538 →
Substrate Carrier Head and Processing System
Application:
62/805,643 →
Temperature Controlled Substrate Carrier and Polishing Components
Application:
18/985,761 →
Temperature Controlled Substrate Carrier
Application:
62/869,427 →
Temperature Controlled Polishing Components
Application:
62/912,523 →
Method and Apparatus for Insitu Adjustment of Wafer Slip Detection During Work Piece Polishing
Application:
62/882,417 →
Method and Apparatus for in-Situ Monitoring of Chemical Mechanical Planarization (Cmp) Processes
Application:
17/838,829 →
Publication:
US 2022/0395956
Method and Apparatus for in-Situ Monitoring of Chemical Mechanical Planarization (Cmp) Processes
Application:
63/202,533 →
Containment and Exhaust System for Substrate Polishing Components
Application:
18/942,031 →
Publication:
US 2025/0065473
Containment and Exhaust System for Substrate Polishing Components
Application:
63/154,175 →
Containment and Exhaust System for Substrate Polishing Components
Application:
63/165,652 →
Carrier for Polishing Workpieces with Flats or Voids
Application:
18/995,709 →
Carrier for Polishing Workpieces with Flats or Voids
Application:
63/369,490 →
Carrier for Polishing Workpieces with Flats or Voids
Application:
63/369,917 →
Apparatus and Method for Closed Loop Controlled Cooling in a Wafer Processing System
Application:
63/514,629 →
Apparatus and Method for in-Situ Chemical Separation and Recirculation in a Chemical Mechanical Processing System
Application:
18/970,666 →
Publication:
US 2025/0187141
Apparatus and Method for in-Situ Chemical Separation and Recirculation in a Chemical Mechanical Processing System
Application:
63/608,749 →
Thermally Conductive Chemical Mechanical Polishing (Cmp) Pad
Application:
19/321,742 →
Thermally Conductive Chemical Mechanical Polishing (Cmp) Pad
Application:
63/693,549 →
Atmospheric Plasma in Wafer Processing System Optimization
Planarized Membrane and Methods for Substrate Processing Systems
Substrate Carrier Head and Processing System
Temperature Controlled Substrate Carrier and Polishing Components
Method and Apparatus for Insitu Adjustment of Wafer Slip Detection During Work Piece Polishing
Method and Apparatus for Insitu Adjustment of Wafer Slip Detection During Work Piece Polishing
Containment and Exhaust System for Substrate Polishing Components
Atmospheric Plasma in Wafer Processing System Optimization
PCT:
PCT/US2018/023820 ↗
Planarized Membrane and Methods for Substrate Processing Systems
PCT:
PCT/US2018/058024 ↗
Cmp Machine with Improved Throughput and Process Flexibility
PCT:
PCT/US2018/026590 ↗
Substrate Carrier Head and Processing System
PCT:
PCT/US2020/015837 ↗
Temperature Controlled Substrate Carrier and Polishing Components
PCT:
PCT/US2020/039767 ↗
Method and Apparatus for Insitu Adjustment of Wafer Slip Detection During Work Piece Polishing
PCT:
PCT/US2020/044109 ↗
Method and Apparatus for in-Situ Monitoring of Chemical Mechanical Planarization (Cmp) Processes
PCT:
PCT/US2022/033204 ↗
Containment and Exhaust System for Substrate Polishing Components
PCT:
PCT/US2022/017711 ↗
Carrier for Polishing Workpieces with Flats or Voids
PCT:
PCT/US2023/028499 ↗
Apparatus and Method for Closed Loop Controlled Cooling in a Wafer Processing System
PCT:
PCT/US2024/038411 ↗
Apparatus and Method for in-Situ Chemical Separation and Recirculation in a Chemical Mechanical Processing System
PCT:
PCT/US2024/058714 ↗
Title Not Available
PCT:
PCT/US2025/045607 ↗
Related Assignments
(25)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignor's Interest
Apr 20, 2017
From: TROJAN, DANIEL RAY; ROBERTS, ROBERT CLARK
To: AXUS TECHNOLOGY, LLC
Reel/Frame 042081/0341 →
Assignment of Assignor's Interest
Dec 15, 2017
From: TROJAN, DANIEL RAY
To: AXUS TECHNOLOGY, LLC
Reel/Frame 044411/0574 →
Assignment of Assignor's Interest
Dec 15, 2017
From: TROJAN, DANIEL RAY
To: AXUS TECHNOLOGY, LLC
Reel/Frame 044411/0916 →
Assignment of Assignor's Interest
Jan 4, 2019
From: TROJAN, DANIEL RAY
To: AXUS TECHNOLOGY, LLC
Reel/Frame 047906/0994 →
Assignment of Assignor's Interest
Oct 24, 2019
From: TROJAN, DANIEL RAY; ROBERTS, ROBERT CLARK
To: AXUS TECHNOLOGY, LLC
Reel/Frame 050821/0409 →
Assignment of Assignor's Interest
Jan 29, 2020
From: TROJAN, DANIEL RAY; DASCHBACH, WILLIAM MANFRED
To: AXUS TECHNOLOGY, LLC
Reel/Frame 051663/0575 →
Assignment of Assignor's Interest
Apr 29, 2020
From: TROJAN, DANIEL RAY
To: AXUS TECHNOLOGY, LLC
Reel/Frame 052529/0256 →
Assignment of Assignor's Interest
Jun 2, 2020
From: TROJAN, DANIEL RAY; SHUGRUE, JOHN KEVIN
To: AXUS TECHNOLOGY, LLC
Reel/Frame 052817/0324 →
Assignment of Assignor's Interest
Jun 2, 2020
From: TROJAN, DANIEL RAY
To: AXUS TECHNOLOGY, LLC
Reel/Frame 052817/0306 →
Assignment of Assignor's Interest
Dec 8, 2020
From: TROJAN, DANIEL RAY
To: AXUS TECHNOLOGY, LLC
Reel/Frame 054578/0845 →
Assignment of Assignor's Interest
Jan 26, 2022
From: TROJAN, DANIEL RAY; SHUGRUE, JOHN KEVIN
To: AXUS TECHNOLOGY, LLC
Reel/Frame 058783/0329 →
Assignment of Assignor's Interest
Jun 9, 2022
From: TROJAN, DANIEL RAY; BRINDLEY, JESSICA
To: AXUS TECHNOLOGY, LLC
Reel/Frame 060155/0308 →
Assignment of Assignor's Interest
Apr 20, 2023
From: TROJAN, DANIEL RAY; SHUGRUE, JOHN KEVIN; DASCHBACH, WILLIAM MANFRED
To: AXUS TECHNOLOGY LLC
Reel/Frame 063393/0826 →
Assignment of Assignor's Interest
Feb 1, 2024
From: TROJAN, DANIEL RAY; SHUGRUE, JOHN KEVIN
To: AXUS TECHNOLOGY LLC
Reel/Frame 066328/0239 →
Assignment of Assignor's Interest
Feb 6, 2024
From: TROJAN, DANIEL RAY; DASCHBACH, WILLIAM MANFRED
To: AXUS TECHNOLOGY, LLC
Reel/Frame 066397/0484 →
Assignment of Assignor's Interest
Mar 18, 2024
From: TROJAN, DANIEL RAY; SHUGRUE, JOHN KEVIN
To: AXUS TECHNOLOGY, LLC
Reel/Frame 066814/0632 →
Assignment of Assignor's Interest
Apr 30, 2024
From: TROJAN, DANIEL RAY; BRINDLEY, JESSICA
To: AXUS TECHNOLOGY, LLC
Reel/Frame 067271/0240 →
Assignment of Assignor's Interest
May 1, 2024
From: TROJAN, DANIEL RAY; SHUGRUE, JOHN KEVIN
To: AXUS TECHNOLOGY, LLC
Reel/Frame 067280/0011 →
Assignment of Assignor's Interest
May 1, 2024
From: TROJAN, DANIEL RAY; SHUGRUE, JOHN KEVIN
To: AXUS TECHNOLOGY, LLC
Reel/Frame 067280/0417 →
Assignment of Assignor's Interest
Sep 18, 2024
From: SHUGRUE, JOHN KEVIN
To: AXUS TECHNOLOGY, LLC
Reel/Frame 068621/0350 →
Assignment of Assignor's Interest
Feb 14, 2025
From: TROJAN, DANIEL RAY; SHUGRUE, JOHN KEVIN
To: AXUS TECHNOLOGY, LLC
Reel/Frame 070225/0239 →
Assignment of Assignor's Interest
Apr 16, 2025
From: TROJAN, DANIEL RAY; SHUGRUE, JOHN KEVIN; DASCHBACH, WILLIAM MANFRED
To: AXUS TECHNOLOGY, LLC
Reel/Frame 070862/0207 →
Assignment of Assignor's Interest
May 2, 2025
From: TROJAN, DANIEL RAY
To: AXUS TECHNOLOGY, LLC
Reel/Frame 071013/0204 →
Assignment of Assignor's Interest
Sep 18, 2025
From: SHUGRUE, JOHN KEVIN
To: AXUS TECHNOLOGY, LLC
Reel/Frame 072303/0799 →
Assignment of Assignor's Interest
Sep 24, 2025
From: TROJAN, DANIEL RAY; SHUGRUE, JOHN KEVIN
To: AXUS TECHNOLOGY, LLC
Reel/Frame 072367/0567 →