IP Library › Patent Application 63202533
Patent Application Provisional Small
App. No. 63/202,533 · Confirmation No. 4306

METHOD AND APPARATUS FOR IN-SITU MONITORING OF CHEMICAL MECHANICAL PLANARIZATION (CMP) PROCESSES

Provisional Application Expired
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 Code Description Pages PDF
2026-02-04 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2026-02-02 ADS Application Data Sheet 1 View
2026-02-02 R46C.REQ Request under 37CFR1.46(c) to correct, update, change applicant 2 View
2026-02-02 CFILE Request for Corrected Filing Receipt 1 View
2026-02-02 PA.. Power of Attorney 2 View
2026-02-02 N417 Electronic Filing System Acknowledgment Receipt 3 View
2026-02-02 R3.73 Assignee showing of ownership per 37 CFR 3.73 14 View
2021-06-22 APP.FILE.REC Filing Receipt 3 View
2021-06-15 DRW Drawings-only black and white line drawings 9 View
2021-06-15 N417.PYMT Electronic Fee Payment 2 View
2021-06-15 ADS Application Data Sheet 8 View
2021-06-15 SPEC Specification 18 View
2021-06-15 CLM Claims 1 View
2021-06-15 APPENDIX Appendix to the specification 27 View
2021-06-15 APPENDIX Appendix to the specification 11 View
2021-06-15 N417 Electronic Filing System Acknowledgment Receipt 3 View
2021-06-15 SPEC Specification — View
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Quick Facts
App. No.
63/202,533
Filed
2021-06-15