IP Library › Patent Application 63154175
Patent Application Provisional Small
App. No. 63/154,175 · Confirmation No. 7107

CONTAINMENT AND EXHAUST SYSTEM FOR SUBSTRATE POLISHING COMPONENTS

Provisional Application Expired
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 Code Description Pages PDF
2026-02-04 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2026-02-02 R46C.REQ Request under 37CFR1.46(c) to correct, update, change applicant 2 View
2026-02-02 CFILE Request for Corrected Filing Receipt 1 View
2026-02-02 ADS Application Data Sheet 1 View
2026-02-02 PA.. Power of Attorney 2 View
2026-02-02 N417 Electronic Filing System Acknowledgment Receipt 2 View
2026-02-02 R3.73 Assignee showing of ownership per 37 CFR 3.73 14 View
2021-03-02 APP.FILE.REC Filing Receipt 3 View
2021-02-26 ADS Application Data Sheet 8 View
2021-02-26 ABST Abstract 1 View
2021-02-26 CLM Claims 2 View
2021-02-26 SPEC Specification 40 View
2021-02-26 DRW.NONBW Drawings-other than black and white line drawings 21 View
2021-02-26 WFEE Fee Worksheet (SB06) 2 View
2021-02-26 N417 Electronic Filing System Acknowledgment Receipt 3 View
2021-02-26 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
2021-02-26 DRW.SUPP Drawings-black and white line and/or other drawings — View
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Quick Facts
App. No.
63/154,175
Filed
2021-02-26