IP Library › Patent Application 62476041
Patent Application Provisional Small
App. No. 62/476,041 · Confirmation No. 5598

ATMOSPHERIC PLASMA IN CMP PAD OPTIMIZATION

Provisional Application Expired
⬇ PDF
 Code Description Pages PDF
2026-02-04 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2026-02-04 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2026-02-02 CFILE Request for Corrected Filing Receipt 1 View
2026-02-02 R46C.REQ Request under 37CFR1.46(c) to correct, update, change applicant 2 View
2026-02-02 PA.. Power of Attorney 2 View
2026-02-02 ADS Application Data Sheet 1 View
2026-02-02 N417 Electronic Filing System Acknowledgment Receipt 2 View
2026-02-02 R3.73 Assignee showing of ownership per 37 CFR 3.73 14 View
2017-04-26 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2017-04-21 PA.. Power of Attorney 2 View
2017-04-21 N417 Electronic Filing System Acknowledgment Receipt 2 View
2017-04-07 APP.FILE.REC Filing Receipt 3 View
2017-03-24 DRW.SUPP Drawings-black and white line and/or other drawings — View
2017-03-24 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
2017-03-24 ADS Application Data Sheet 8 View
2017-03-24 DRW.NONBW Drawings-other than black and white line drawings 7 View
2017-03-24 SPEC Specification 14 View
2017-03-24 CLM Claims 2 View
2017-03-24 ABST Abstract 1 View
2017-03-24 WFEE Fee Worksheet (SB06) 2 View
2017-03-24 N417 Electronic Filing System Acknowledgment Receipt 3 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
App. No.
62/476,041
Filed
2017-03-24