IP Library › Patent Application 63514629
Patent Application Provisional Small
App. No. 63/514,629 · Confirmation No. 6954

APPARATUS AND METHOD FOR CLOSED LOOP CONTROLLED COOLING IN A WAFER PROCESSING SYSTEM

Provisional Application Expired
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 Code Description Pages PDF
2026-02-04 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2026-02-02 ADS Application Data Sheet 1 View
2026-02-02 PA.. Power of Attorney 2 View
2026-02-02 CFILE Request for Corrected Filing Receipt 1 View
2026-02-02 R46C.REQ Request under 37CFR1.46(c) to correct, update, change applicant 2 View
2026-02-02 N417 Electronic Filing System Acknowledgment Receipt 3 View
2026-02-02 R3.73 Assignee showing of ownership per 37 CFR 3.73 14 View
2024-04-28 M327 Miscellaneous Communication to Applicant - No Action Count 1 View
2024-04-28 M327 Miscellaneous Communication to Applicant - No Action Count 1 View
2023-08-04 APP.FILE.REC Filing Receipt 3 View
2023-07-20 SPEC Specification — View
2023-07-20 N417.PYMT Electronic Fee Payment 2 View
2023-07-20 APPENDIX Appendix to the specification 32 View
2023-07-20 ADS Application Data Sheet 8 View
2023-07-20 SPEC Specification 1 View
2023-07-20 DRW.NONBW Drawings-other than black and white line drawings 2 View
2023-07-20 N417 Electronic Filing System Acknowledgment Receipt 2 View
2023-07-20 APPENDIX.SUPP Appendix to the specification — View
2023-07-20 DRW.SUPP Drawings-black and white line and/or other drawings — View
2023-07-20 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
2023-07-20 APPENDIX Appendix to the specification 1 View
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Quick Facts
App. No.
63/514,629
Filed
2023-07-20