Patent Assignment
Reel/Frame 067306/0596
Assignment of Assignor's Interest
Recorded: 2024-05-03
Pages: 9
Assignors
COLVIN, NEIL
Executed: 2023-12-07
SPORLEDER, DAVID
Executed: 2023-08-01
VERKERK, UDO H.
Executed: 2024-05-02
GUPTA, ATUL
Executed: 2023-12-08
MOORE, EDWARD
Executed: 2023-08-01
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Ion Implantation System and Method for Implanting Aluminum Using Non-Fluorine-Containing Halide Species or Molecules