Patent Assignment
Reel/Frame 067635/0803
Assignment of Assignor's Interest
Recorded: 2024-06-06
Pages: 5
Assignors
LAMBERT, MARTIN
Executed: 2024-04-17
REGAARD, BORIS
Executed: 2024-04-22
ERGIN, TOLGA
Executed: 2024-04-17
SCHLOSSER, OLIVER
Executed: 2024-04-17
Assignee
TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING GMBH
JOHANN-MAUS-STRASSE 2, DITZINGEN, 71254, GERMANY
Covered Property
(1)
Euv Light Source with a Beam Positioning Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.