Patent Assignment
Reel/Frame 067816/0184
Assignment of Assignor's Interest
Recorded: 2024-06-24
Pages: 6
Assignors
WIENER, ROBERTO B.
Executed: 2021-01-31
MANKALA, KALYAN KUMAR
Executed: 2021-02-01
DOWNEY, TODD R.
Executed: 2021-02-03
Assignee
ASML HOLDING N.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Fast Uniformity Drift Correction