Patent Assignment
Reel/Frame 067861/0168
Assignment of Assignor's Interest
Recorded: 2024-06-27
Pages: 4
Assignor
LEVINSKI, VLADIMIR
Executed: 2024-06-13
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Small in-Die Target Design for Overlay Measurement