Small in-die target design for overlay measurement
An overlay metrology system may generate overlay measurements based on isolated images of features on different layers of an overlay target. For example, a target may include a first-layer structure including periodic features with a fine pitch selected to be unresolved by the overlay metrology system, where the gratings structures are oriented to rotate a polarization of rotated diffraction orders relative to a polarization of incident illumination, where the rotated diffraction orders include at least first-order diffraction. In this way, first images generated with a collection polarizer oriented to capture the rotated diffraction orders may include only the first-layer structure, whereas second images generated with a collection polarizer oriented to be aligned with a polarization of incident illumination may include only the second-layer features.
1. An overlay metrology system comprising:
a controller including one or more processors configured to execute program instructions causing the one or more processors to:
receive one or more first images of an overlay target on a sample based on illumination with an illumination beam in accordance with a metrology recipe, wherein the overlay target comprises:
a first-layer structure on a first layer of the sample, wherein the first-layer structure includes a first set of periodic features and a second set of periodic features oriented at a 90-degree angle with respect to the first set of periodic features, wherein the illumination beam is polarized at a 45-degree angle with respect to the first set of periodic features and the second set of periodic features when implementing the metrology recipe, wherein the first set of periodic features and the second set of periodic features are arranged in accordance with the metrology recipe to rotate a polarization of one or more rotated diffraction orders from the first-layer structure relative to a polarization of zero-order diffraction, wherein the one or more rotated diffraction orders include at least first-order diffraction from the first-layer structure; and
a second-layer structure on a second layer of the sample, wherein the second-layer structure includes one or more features providing an unmodified polarization direction for light emanating from the second-layer structure in response to the illumination beam;
wherein the one or more first images are generated with first polarization-filtered light aligned with the polarization of the one or more rotated diffraction orders;
receive one or more second images of the overlay target based on the illumination with the illumination beam in accordance with the metrology recipe, wherein the one or more second images are generated with second polarization-filtered light aligned orthogonal to the polarization of the one or more rotated diffraction orders; and
determine one or more overlay measurements of the sample based on the one or more first images and the one or more second images.
2. The overlay metrology system of claim 1 , wherein a size of the overlay target is three micrometers or smaller in any dimension.
3. The overlay metrology system of claim 1 , wherein the first layer of the sample is a process layer, wherein the second layer of the sample is a resist layer.
4. The overlay metrology system of claim 1 , wherein the first layer of the sample is a resist layer, wherein the second layer of the sample is a process layer.
5. The overlay metrology system of claim 1 , wherein the first set of periodic features and the second set of periodic features include features with a pitch smaller than a wavelength of the illumination beam.
6. The overlay metrology system of claim 1 , wherein the illumination beam has a circular profile.
7. The overlay metrology system of claim 1 , wherein the illumination beam has a wedge-shaped profile.
8. The overlay metrology system of claim 7 , wherein an edge of the wedge-shaped profile is oriented parallel to a polarization direction of the illumination beam.
9. The overlay metrology system of claim 7 , wherein an edge of the wedge-shaped profile is oriented orthogonal to a polarization direction of the illumination beam.
10. The overlay metrology system of claim 1 , wherein the one or more first images include the first-layer structure and exclude the second-layer structure.
11. The overlay metrology system of claim 10 , wherein the one or more second images include the second-layer structure and exclude the first-layer structure.
12. The overlay metrology system of claim 1 , wherein the first-layer structure includes an interleaved pattern of alternating zones of the first set of periodic features and the second set of periodic features, wherein a pitch of the first set of periodic features and the second set of periodic features is a fine pitch, wherein the first-layer structure has a first coarse pitch associated with a spatial extent of a first of the zones including at least some of the first set of periodic features and an adjacent one of the zones including at least some of the second set of periodic features.
13. The overlay metrology system of claim 12 , wherein the second-layer structure is non-periodic.
14. The overlay metrology system of claim 13 , wherein the second-layer structure is a cross structure.
15. An overlay metrology system comprising:
an illumination source configured to generate an illumination beam;
an illumination sub-system including one or more lenses to direct the illumination beam to an overlay target on a sample when implementing a metrology recipe, wherein the overlay target in accordance with the metrology recipe comprises:
a first-layer structure on a first layer of the sample, wherein the first-layer structure includes a first set of periodic features and a second set of periodic features oriented at a 90-degree angle with respect to the first set of periodic features, wherein the first set of periodic features and the second set of periodic features are arranged in accordance with the metrology recipe to rotate a polarization of one or more rotated diffraction orders from the first-layer structure relative to a polarization of zero-order diffraction, wherein the one or more rotated diffraction orders include at least first-order diffraction from the first-layer structure; and
a second-layer structure on a second layer of the sample, wherein the second-layer structure includes one or more features providing an unmodified polarization direction for light emanating from the second-layer structure in response to the illumination beam;
an imaging sub-system including one or more channels, each including one or more polarizers and one or more detectors, wherein the one or more channels are configured to generate one or more first images with first polarization-filtered light aligned with the polarization of the one or more rotated diffraction orders, wherein the one or more channels are configured to generate one or more second images with second polarization-filtered light aligned orthogonal to the polarization of the one or more rotated diffraction orders; and
a controller communicatively coupled to the one or more detectors, the controller including one or more processors configured to execute program instructions causing the one or more processors to determine overlay measurements of the sample based on the one or more first images and the one or more second images.
16. The overlay metrology system of claim 15 , wherein a size of the overlay target is three micrometers or smaller in any dimension.
17. The overlay metrology system of claim 15 , wherein the first set of periodic features and the second set of periodic features include features with a pitch smaller than a wavelength of the illumination beam.
18. The overlay metrology system of claim 15 , wherein the one or more channels comprise:
a first channel to generate the one or more first images, wherein the first channel includes a first of the one or more detectors and a first polarizer aligned with the polarization of the one or more rotated diffraction orders; and
a second channel to generate the one or more second images, wherein the second channel includes a second of the one or more detectors and a second polarizer orthogonal to the polarization of the one or more rotated diffraction orders.
19. The overlay metrology system of claim 15 , wherein the one or more channels includes a single channel with a single polarizer, wherein the one or more first images are generated with the single polarizer aligned with the polarization of the one or more rotated diffraction orders, wherein the one or more second images are generated with the single polarizer orthogonal to the polarization of the one or more rotated diffraction orders.
20. The overlay metrology system of claim 15 , wherein the first layer of the sample is a process layer, wherein the second layer of the sample is a resist layer.
21. The overlay metrology system of claim 15 , wherein the first layer of the sample is a resist layer, wherein the second layer of the sample is a process layer.
22. The overlay metrology system of claim 15 , wherein the illumination beam has a circular profile.
23. The overlay metrology system of claim 15 , wherein the illumination beam has a wedge-shaped profile.
24. The overlay metrology system of claim 23 , wherein an edge of the wedge-shaped profile is oriented parallel to a polarization direction of the illumination beam.
25. The overlay metrology system of claim 23 , wherein an edge of the wedge-shaped profile is oriented orthogonal to a polarization direction of the illumination beam.
26. The overlay metrology system of claim 15 , wherein the one or more first images include the first-layer structure and exclude the second-layer structure.
27. The overlay metrology system of claim 26 , wherein the one or more second images include the second-layer structure and exclude the first-layer structure.
28. The overlay metrology system of claim 15 , wherein the first-layer structure includes an interleaved pattern of alternating zones of the first set of periodic features and the second set of periodic features, wherein a pitch of the first set of periodic features and the second set of periodic features is a fine pitch, wherein the first-layer structure has a first coarse pitch associated with a spatial extent of a first of the zones including at least some of the first set of periodic features and an adjacent one of the zones including at least some of the second set of periodic features.
29. The overlay metrology system of claim 28 , wherein the second-layer structure is non-periodic.
30. The overlay metrology system of claim 29 , wherein the second-layer structure is a cross structure.
31. An overlay metrology method comprising:
generating one or more first images of an overlay target on a sample based on illumination with an illumination beam in accordance with a metrology recipe, wherein the overlay target comprises:
a first-layer structure on a first layer of the sample, wherein the first-layer structure includes a first set of periodic features and a second set of periodic features oriented at a 90-degree angle with respect to the first set of periodic features, wherein the illumination beam is polarized at a 45-degree angle with respect to the first set of periodic features and the second set of periodic features when implementing the metrology recipe, wherein the first set of periodic features and the second set of periodic features are arranged in accordance with the metrology recipe to rotate a polarization of one or more rotated diffraction orders from the first-layer structure relative to a polarization of zero-order diffraction, wherein the one or more rotated diffraction orders include at least first-order diffraction from the first-layer structure; and
a second-layer structure on a second layer of the sample, wherein the second-layer structure includes one or more features providing an unmodified polarization direction for light emanating from the second-layer structure in response to the illumination beam;
wherein the one or more first images are generated with first polarization-filtered light aligned with the polarization of the one or more rotated diffraction orders, wherein the one or more first images include the first-layer structure and exclude the second-layer structure;
generating one or more second images of the overlay target based on the illumination with the illumination beam in accordance with the metrology recipe, wherein the one or more second images are generated with second polarization-filtered light aligned orthogonal to the polarization of the one or more rotated diffraction orders, wherein the one or more second images include the second-layer structure and exclude the first-layer structure; and
determining overlay measurements of the sample based on the one or more first images and the one or more second images.