Patent Assignment
Reel/Frame 067960/0496
Assignment of Assignor's Interest
Recorded: 2024-07-11
Pages: 3
Assignors
MATHIJSSEN, SIMON GIJSBERT JOSEPHUS
Executed: 2019-02-07
DEN BOEF, ARIE JEFFREY
Executed: 2019-02-07
BHATTACHARYYA, KAUSTUVE
Executed: 2019-02-07
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method for Overlay Metrology and Apparatus Thereof