Patent Assignment
Reel/Frame 067993/0256
Assignment of Assignor's Interest
Recorded: 2024-07-16
Pages: 2
Assignor
MORI, SHINGO
Executed: 2024-06-20
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHINSUGITA-CHO, ISOGO-KU, KANAGAWA, YOKOHAMA-SHI, 235-8522, JAPAN
Covered Property
(1)
Effective Temperature Calculation Method for Multi-Charged Particle Beam Writing Region, Multi-Charged Particle Beam Writing Apparatus, Multi-Charged Particle Beam Writing Method, and Recording Medium Recording Program
Patent:
12,230,472 →
Application:
18/772,999 →