Patent Assignment
Reel/Frame 068041/0049
Assignment of Assignor's Interest
Recorded: 2024-07-22
Pages: 8
Assignors
SWILLAM, MOHAMED
Executed: 2021-01-22
KREUZER, JUSTIN LLOYD
Executed: 2021-02-23
ROUX, STEPHEN
Executed: 2021-01-22
NELSON, MICHAEL LEO
Executed: 2021-01-22
ERALP, MUHSIN
Executed: 2021-01-22
Assignee
ASML HOLDING N.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Systems and Methods for Measuring Intensity in a Lithographic Alignment Apparatus