Patent Assignment
Reel/Frame 069181/0309
Assignment of Assignor's Interest
Recorded: 2024-11-07
Pages: 20
Assignors
MAEDA, KOJI
Executed: 2022-01-17
SHIMADA, ATSUSHI
Executed: 2022-01-17
OIKAWA, KATSUSHI
Executed: 2022-09-05
MIYASHITA, TETSUYA
Executed: 2022-01-17
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Film Forming Apparatus and Film Forming Method