Patent Assignment
Reel/Frame 069558/0321
Assignment of Assignor's Interest
Recorded: 2024-12-11
Pages: 8
Assignors
LIU, FEI
Executed: 2020-07-29
LIAN, JIN
Executed: 2020-07-29
HUANG, ZHUANGXIONG
Executed: 2020-07-29
DE WINTER, LAURENTIUS CORNELIUS
Executed: 2020-08-10
STAALS, FRANK
Executed: 2020-12-11
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Methods and Patterning Devices and Apparatuses for Measuring Focus Performance of a Lithographic Apparatus, Device Manufacturing Method