Patent Assignment
Reel/Frame 070918/0416
Assignment of Assignor's Interest
Recorded: 2025-04-23
Pages: 10
Assignors
YOKOTA, AKIHIRO
Executed: 2025-04-04
TERASHIMA, RYO
Executed: 2023-08-09
MURAKAMI, TOMO
Executed: 2023-08-17
SAINO, TAKAHARU
Executed: 2023-08-17
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method