Patent Assignment
Reel/Frame 072742/0880
Assignment of Assignor's Interest
Recorded: 2025-10-31
Pages: 3
Assignor
HALLING, ALFRED MIKE
Executed: 2016-09-16
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
In Situ Beam Current Monitoring and Control in Scanned Ion Implantation Systems
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Feb 14, 2017
From: HALLING, ALFRED MIKE
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 041250/0955 →
Security Interest
Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest
Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →