Patent Assignment
Reel/Frame 072842/0882
Assignment of Assignor's Interest
Recorded: 2025-11-10
Pages: 12
Assignors
CHO, TAE H.
Executed: 2022-11-28
HERMAN, ELLIS
Executed: 2024-07-01
TREJO, ORLANDO
Executed: 2024-03-29
ROSE, MATTISON
Executed: 2022-09-20
RANSOHOFF, LAUREN
Executed: 2024-03-31
DASGUPTA, NEIL
Executed: 2025-07-17
BARTON, KIRA
Executed: 2022-09-13
PARK, HYUNWOO
Executed: 2025-07-17
BROOKS, ANDRE
Executed: 2022-08-26
Assignee
THE REGENTS OF THE UNIVERSITY OF MICHIGAN
1600 HURON PARKWAY, 2ND FLOOR, ANN ARBOR, MICHIGAN, 48109-2590
Covered Property
(1)
Mechatronic Spatial Atomic Layer Deposition System with Closed-Loop Feedback Control of Parallelism and Component Alignment