Assignment of Assignor's Interest

Recorded: 2026-04-16 Pages: 3

Assignor

AKIMOTO, TAKESHI

Executed: 2022-12-22

Assignee

TOKYO ELECTRON LIMITED

3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN

Covered Property (1)

Substrate Processing System, Substrate Processing Method, and Map Creating Device

Application: 18/012,786 →

Publication: US 2023/0253224