Gettering/stop layer for prevention of reduction of insulating oxide in metal-insulator-metal device
View Patent ↗An electronic device includes a first electrode, a second electrode and an insulating layer between the first and second electrodes, which insulating layer may be susceptible to reduction by H 2 . A gettering layer is provided on and in contact with the first electrode, the gettering layer acting as a protective layer for substantially avoiding reduction of the insulating layer by capturing and immobilizing H 2 . A glue layer may be provided between the gettering layer and first electrode. An additional gettering layer may be provided on and in contact with the second electrode, and a glue layer may be provided between the second electrode and additional gettering layer.
1. An electronic device comprising:
a first electrode;
a second electrode;
an insulating layer between and in direct contact with the first and second electrodes, wherein the insulating layer comprises an oxide layer, wherein the second electrode and the insulating layer are formed in an opening in a dielectric layer, and wherein the first electrode is above and in contact with the dielectric layer; and
a first and second protective body for substantially avoiding reduction of the insulating layer;
further comprising a first glue layer in direct contact with the first electrode, and a second glue layer in direct contact with the second electrode, the first protective body being in contact with the first glue layer, and the second protective body being in contact with the second glue layer.
2. The electronic device of claim 1 wherein the first and second protective body are gettering layers which capture a reducing agent.
3. The electronic device of claim 1 wherein the insulating layer may be reduced by H 2 , and the first and second protective layers capture H 2 .
4. The electronic device of claim 1 wherein the electronic device is a capacitor.
5. The electronic device of claim 1 wherein the electronic device is a memory device.
6. An electronic device comprising:
a first electrode;
a second electrode;
an oxide layer between the first and second electrodes, which oxide layer may be reduced by H 2 , wherein the second electrode is formed within an opening in a dielectric layer; and wherein the oxide layer is above and in contact with the dielectric layer and
a gettering layer on and in contact with the first electrode covering the top and sides of the first electrode and oxide layer, the gettering layer acting as a protective layer for substantially avoiding reduction of the oxide layer by capturing H 2 .
7. The electronic device of claim 6 wherein the gettering layer comprises Ti.
8. The electronic device of claim 6 wherein the electronic device is a capacitor.
9. The electronic device of claim 6 wherein the electronic device is a memory device.
10. An electronic device comprising:
a first electrode;
a second electrode;
an oxide layer between and in direct contact with the first and second electrodes, which oxide layer may be reduced by H 2 , wherein the second electrode and the oxide layer are formed in an opening in a dielectric layer, and wherein the first electrode is above and in contact with the dielectric layer;
a first glue layer on and in direct contact with the first electrode, and a second glue layer on and in direct contact with the second electrode; and
a first gettering layer on and in contact with the first glue layer, and a second gettering layer on and in contact with the second glue layer, the first and second gettering layers acting as protective layers for substantially avoiding reduction of the oxide layer by capturing H 2 .
11. The electronic device of claim 10 wherein the first and second gettering layers comprise Ti.
12. The electronic device of claim 10 wherein the electronic device is a capacitor.
13. The electronic device of claim 10 wherein the electronic device is a memory device.
14. The electronic device of claim 1 and further comprising said device incorporated in a system.
15. The electronic device of claim 14 wherein the system is selected from the group consisting of a hand-held device, a vehicle, and a computer.