Cavity-type semiconductor package and method of packaging same
View Patent ↗A method ( 30 ) of forming a semiconductor package ( 20 ) entails applying ( 56 ) an adhesive ( 64 ) to a portion ( 66 ) of a bonding perimeter ( 50 ) of a base ( 22 ), with a section ( 68 ) of the perimeter ( 50 ) being without the adhesive ( 64 ). A lid ( 24 ) is placed on the base ( 22 ) so that a bonding perimeter ( 62 ) of the lid ( 24 ) abuts the bonding perimeter ( 50 ) of the base ( 22 ). The lid ( 24 ) includes a cavity ( 25 ) in which dies ( 38 ) mounted to the base ( 22 ) are located. A gap ( 70 ) is formed without the adhesive ( 64 ) at the section ( 68 ) between the base ( 22 ) and the lid ( 24 ). The structure vents from the gap ( 70 ) as air inside the cavity ( 25 ) expands during heat curing ( 72 ). Following heat curing ( 72 ), another adhesive ( 80 ) is dispensed in the section ( 68 ) to close the gap ( 70 ) and seal the cavity ( 25 ).
1. A semiconductor package comprising:
a base having a first bonding perimeter;
a semiconductor die coupled to a surface of said base within an area delineated by said first bonding perimeter of said base;
a lid having a second bonding perimeter configured to abut said first bonding perimeter when said lid is coupled to said base, wherein said lid is shaped to include a cavity in which said semiconductor die resides;
an electrically conductive epoxy adhesive material applied to a portion of at least one of said first and second bonding perimeters such that at least one remaining section of both of said first and second bonding perimeters is without said electrically conductive epoxy adhesive material to produce at least one gap between said base and said lid at one or more locations where said remaining section is without said first adhesive material, wherein said electrically conductive epoxy adhesive material comprises a heat curable material, said heat curable material cures at a first temperature of at least one hundred seventy degrees Celsius, and said at least one gap allows venting of air from inside said cavity during a heat curing process; and
a second adhesive material applied to said at least one remaining section to close said gap.
2. The semiconductor package of claim 1 wherein said second adhesive material is applied following application said heat curing process.
3. The semiconductor package of claim 1 wherein said second adhesive material comprises a room temperature curable material.
4. The semiconductor package of claim 1 wherein said second adhesive material comprises an ultraviolet radiation curable material.
5. The semiconductor package of claim 1 wherein said cavity is hermetically sealed following application of said second adhesive material.
6. The semiconductor package of claim 1 wherein said second adhesive material is further applied around an entire outer perimeter of said lid at a junction between said base and said lid.
7. A semiconductor package comprising:
a base having a first bonding perimeter;
a semiconductor die coupled to a surface of said base within an area delineated by said first bonding perimeter of said base;
a lid having a second bonding perimeter configured to abut said first bonding perimeter when said lid is coupled to said base, wherein said lid is shaped to include a cavity in which said semiconductor die resides;
an electrically conductive epoxy adhesive material applied to a portion of at least one of said first and second bonding perimeters such that at least one remaining section of both of said first and second bonding perimeters is without said electrically conductive epoxy adhesive material to produce at least one gap between said base and said lid at one or more locations where said remaining section is without said first adhesive material, wherein said electrically conductive epoxy adhesive material comprises a heat curable material, said heat curable material cures at a first temperature of at least one hundred seventy degrees Celsius, and said at least one gap allows venting of air from inside said cavity during a heat curing process; and
a second adhesive material applied to said at least one remaining section to close said gap, wherein said second adhesive material comprises a room temperature curable material.
8. The semiconductor package of claim 7 wherein said second adhesive material is applied following application said heat curing process.
9. The semiconductor package of claim 7 wherein said cavity is hermetically sealed following application of said second adhesive material.
10. The semiconductor package of claim 7 wherein said second adhesive material is further applied around an entire outer perimeter of said lid at a junction between said base and said lid.
11. A semiconductor package comprising:
a base having a first bonding perimeter;
a semiconductor die coupled to a surface of said base within an area delineated by said first bonding perimeter of said base;
a lid having a second bonding perimeter configured to abut said first bonding perimeter when said lid is coupled to said base, wherein said lid is shaped to include a cavity in which said semiconductor die resides;
an electrically conductive epoxy adhesive material applied to a portion of at least one of said first and second bonding perimeters such that at least one remaining section of both of said first and second bonding perimeters is without said electrically conductive epoxy adhesive material to produce at least one gap between said base and said lid at one or more locations where said remaining section is without said first adhesive material, wherein said electrically conductive epoxy adhesive material comprises a heat curable material, said heat curable material cures at a first temperature of at least one hundred seventy degrees Celsius, and said at least one gap allows venting of air from inside said cavity during a heat curing process; and
a second adhesive material applied to said at least one remaining section to close said gap, wherein said second adhesive material comprises an ultraviolet radiation curable material.
12. The semiconductor package of claim 2 wherein said second adhesive material is applied following application said heat curing process.
13. The semiconductor package of claim 11 wherein said cavity is hermetically sealed following application of said second adhesive material.
14. The semiconductor package of claim 11 wherein said second adhesive material is further applied around an entire outer perimeter of said lid at a junction between said base and said lid.