Granted Patent
Utility
US 6,665,575
· Confirmation No. 1745
RECIPE EDITOR FOR EDITING AND CREATING PROCESS RECIPES WITH PARAMETER-LEVEL SECURITY FOR VARIOUS KINDS OF SEMICONDUCTOR-MANUFACTURING EQUIPMENT
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-10-03 | IFEE |
Issue Fee Payment (PTO-85B) | 3 | View | |
| 2003-10-03 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-10-03 | DRW |
Drawings-only black and white line drawings | 9 | View | |
| 2002-01-18 | TRNA |
Transmittal of New Application | 7 | View | |
| 2002-01-18 | ADS |
Application Data Sheet | 2 | View | |
| 2002-01-18 | SPEC |
Specification | 23 | View | |
| 2002-01-18 | CLM |
Claims | 2 | View | |
| 2002-01-18 | ABST |
Abstract | 2 | View | |
| 2002-01-18 | DRW |
Drawings-only black and white line drawings | 9 | View | |
| 2002-01-18 | LET. |
Miscellaneous Incoming Letter | 1 | View |
Inventors
Manoj Betawar
Fremont, CA
Vrunda Bhagwat
Santa Clara, CA
Dinesh Goradia
Fremont, CA
Manish Mehta
Santa Clara, CA
Nitin Parekh
Milpitas, CA
Attorneys & Agents of Record
Classification
USPC
700/121
Prosecution
- Examiner
- RODRIGUEZ, PAUL L
- Art Unit
- 2125
- Customer No.
- 35273
- Docket No.
- SYN-0463-1D
- Confirmation No.
- 1745
Publication
- Pub. No.
- US20020055804A1
- Pub. Date
- 2002-05-09
Patent Term Adjustment
-5days
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Quick Facts
- Patent No.
- US 6,665,575
- App. No.
- 09/683,569
- Filed
- 2002-01-18
- Granted
- 2003-12-16
- Pub. No.
- US20020055804A1
- Examiner
- RODRIGUEZ, PAUL L
- Art Unit
- 2125
- PTA
- -5 days
External Links