IP Library Granted Patent US 6,667,242
Granted Patent Utility
US 6,667,242 · Confirmation No. 6580

BIRM AND GAS ESCAPE FOR NON-CONTACT WAFER HOLDER

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Code Description Pages PDF
2020-06-11 OATH Oath or Declaration filed 262 View
2012-07-02 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2012-07-02 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2012-06-21 PA.. Power of Attorney 1 View
2012-06-21 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2012-06-21 N417 Electronic Filing System Acknowledgment Receipt 2 View
2003-09-02 IFEE Issue Fee Payment (PTO-85B) 1 View
2001-01-08 TRNA Transmittal of New Application 2 View
2001-01-08 A.PE Preliminary Amendment 4 View
2001-01-08 SPEC Specification 9 View
2001-01-08 CLM Claims 4 View
2001-01-08 ABST Abstract 1 View
2001-01-08 DRW Drawings-only black and white line drawings 5 View
2001-01-08 OATH Oath or Declaration filed 3 View
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Quick Facts
Patent No.
US 6,667,242
App. No.
09/757,242
Filed
2001-01-08
Granted
2003-12-23
Pub. No.
US20010002613A1
Art Unit
1763
PTA
-41 days