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App. No. 09/759,905 · Confirmation No. 2825

ADDITION OF PLANARIZING DIELECTRIC LAYER TO REDUCE A DISHING PHENOMENA EXPERIENCED DURING A CHEMICAL MECHANICAL PROCEDURE USED IN THE FORMATION OF SHALLOW TRENCH ISOLATION REGIONS

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗
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2011-10-25 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2011-10-25 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2011-10-13 C.AD Change of Address 2 View
2011-10-13 PA.. Power of Attorney 2 View
2011-10-13 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-10-13 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2001-01-16 TRNA Transmittal of New Application 1 View
2001-01-16 SPEC Specification 11 View
2001-01-16 CLM Claims 7 View
2001-01-16 ABST Abstract 1 View
2001-01-16 DRW Drawings-only black and white line drawings 3 View
2001-01-16 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
09/759,905
Filed
2001-01-16
Granted
2002-06-04
Art Unit
2813
PTA
-53 days