IP Library › Granted Patent US 6,539,891
Granted Patent Utility PCT National Stage
US 6,539,891 · Confirmation No. 4575

CHEMICAL DEPOSITION REACTOR AND METHOD OF FORMING A THIN FILM USING THE SAME

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2006-06-02 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2001-02-14 LET. Miscellaneous Incoming Letter 27 View
2001-02-14 LET. Miscellaneous Incoming Letter 27 View
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Quick Facts
Patent No.
US 6,539,891
App. No.
09/763,238
Filed
2001-02-14
Granted
2003-04-01
Art Unit
1763
PTA
0 days