IP Library › Granted Patent US 6,387,185
Granted Patent Utility
US 6,387,185 · Confirmation No. 9072

PROCESSING CHAMBER FOR ATOMIC LAYER DEPOSITION PROCESSES

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 Code Description Pages PDF
2009-08-10 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2009-08-07 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2009-08-05 LET. Miscellaneous Incoming Letter 1 View
2009-08-05 LET. Miscellaneous Incoming Letter 1 View
2009-08-05 N417 Electronic Filing System Acknowledgment Receipt 2 View
2001-01-16 TRNA Transmittal of New Application 3 View
2001-01-16 SPEC Specification 50 View
2001-01-16 CLM Claims 3 View
2001-01-16 ABST Abstract 1 View
2001-01-16 DRW Drawings-only black and white line drawings 23 View
2001-01-16 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,387,185
App. No.
09/764,035
Filed
2001-01-16
Granted
2002-05-14
Pub. No.
US20010011526A1
Art Unit
1763
PTA
0 days