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App. No. 10/123,293 · Confirmation No. 1746

PROCESSING CHAMBER FOR ATOMIC LAYER DEPOSITION PROCESSES

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2008-03-20 LET. Miscellaneous Incoming Letter 1 View
2008-03-20 LET. Miscellaneous Incoming Letter 1 View
2008-03-20 N417 Electronic Filing System Acknowledgment Receipt 2 View
2004-10-04 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-08-18 CTMS Miscellaneous Action with shortened statutory period (SSP) 3 View
2004-08-18 1449 List of References cited by applicant and considered by examiner 1 View
2004-08-18 XRUSH Internal Response to Printer Query from Technology Center(TC) 1 View
2004-07-27 RUSH Printer Query form, used by the publications branch 2 View
2004-06-30 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-06-30 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-06-30 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-06-30 SRFW Search information including classification, databases and other search related notes 1 View
2004-06-25 SRNT Examiner's search strategy and results 2 View
2004-06-23 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2004-06-01 XT/ Extension of Time 1 View
2004-05-28 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2004-05-28 SPEC Specification 1 View
2004-05-28 CLM Claims 1 View
2004-05-28 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2004-05-28 DIST Terminal Disclaimer Filed 1 View
2004-05-28 PA.. Power of Attorney 4 View
2004-05-28 LET. Miscellaneous Incoming Letter 2 View
2004-05-28 WFEE Fee Worksheet (SB06) 1 View
2003-12-05 CTNF Non-Final Rejection 7 View
2003-12-05 892 List of references cited by examiner 2 View
2003-12-05 SRFW Search information including classification, databases and other search related notes 1 View
2003-12-01 SRNT Examiner's search strategy and results 2 View
2002-04-15 TRNA Transmittal of New Application 3 View
2002-04-15 A.PE Preliminary Amendment 2 View
2002-04-15 SPEC Specification 48 View
2002-04-15 CLM Claims 3 View
2002-04-15 ABST Abstract 1 View
2002-04-15 DRW Drawings-only black and white line drawings 23 View
2002-04-15 OATH Oath or Declaration filed 2 View
2002-04-15 WFEE Fee Worksheet (SB06) 1 View
2002-04-15 WFEE Fee Worksheet (SB06) 1 View
2002-04-15 WCLM Claims Worksheet (PTO-2022) 1 View
2002-04-15 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
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Quick Facts
App. No.
10/123,293
Filed
2002-04-15
Granted
2004-11-16
Pub. No.
US20020108714A1
Art Unit
1763
PTA
-88 days