IP Library Granted Patent US 6,519,045
Granted Patent Utility
US 6,519,045 · Confirmation No. 1096

METHOD AND APPARATUS FOR MEASURING VERY THIN DIELECTRIC FILM THICKNESS AND CREATING A STABLE MEASUREMENT ENVIRONMENT

Inventor: Daewon Kwon
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Code Description Pages PDF
2020-07-02 OATH Oath or Declaration filed 84 View
2007-11-15 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2007-11-15 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2001-01-31 TRNA Transmittal of New Application 3 View
2001-01-31 SPEC Specification 21 View
2001-01-31 CLM Claims 13 View
2001-01-31 ABST Abstract 1 View
2001-01-31 DRW Drawings-only black and white line drawings 3 View
2001-01-31 TRNA Transmittal of New Application 3 View
2001-01-31 SPEC Specification 21 View
2001-01-31 CLM Claims 13 View
2001-01-31 ABST Abstract 1 View
2001-01-31 DRW Drawings-only black and white line drawings 3 View
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Quick Facts
Patent No.
US 6,519,045
App. No.
09/772,901
Filed
2001-01-31
Granted
2003-02-11
Pub. No.
US20020102748A1
Art Unit
2877
PTA
-27 days