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App. No. 09/783,069 · Confirmation No. 3260

CHEMICAL-MECHANICAL PLANARIZATION USING OZONE

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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2005-05-23 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2005-04-25 PA.. Power of Attorney 2 View
2004-02-23 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-02-06 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2004-02-06 1449 List of References cited by applicant and considered by examiner 1 View
2003-12-10 LET. Miscellaneous Incoming Letter 4 View
2003-12-10 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-12-10 FOR Foreign Reference 16 View
2003-12-10 FOR Foreign Reference 19 View
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2003-11-19 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-11-19 NOA Notice of Allowance and Fees Due (PTOL-85) 1 View
2003-11-19 1449 List of References cited by applicant and considered by examiner 1 View
2003-11-19 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-10-31 WFEE Fee Worksheet (SB06) 1 View
2003-10-31 FWCLM Index of Claims 1 View
2003-10-06 A.PE Preliminary Amendment 2 View
2003-10-06 CLM Claims 3 View
2003-10-06 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-09-30 RCEX Request for Continued Examination (RCE) 1 View
2003-09-30 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-09-30 LET. Miscellaneous Incoming Letter 1 View
2003-09-29 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-09-29 CLM Claims 3 View
2003-09-29 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2003-08-07 CTEQ Ex Parte Quayle Action 5 View
2003-06-16 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2003-06-16 CLM Claims 3 View
2003-06-16 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-05-05 C.AD Change of Address 1 View
2003-03-14 CTNF Non-Final Rejection 6 View
2003-03-14 892 List of references cited by examiner 1 View
2003-03-14 1449 List of References cited by applicant and considered by examiner 1 View
2003-01-31 LET. Miscellaneous Incoming Letter 1 View
2003-01-31 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-01-31 CLM Claims 2 View
2003-01-31 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-01-31 CLM Claims 3 View
2003-01-31 XT/ Extension of Time 1 View
2003-01-31 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-01-31 FOR Foreign Reference 1 View
2003-01-31 FOR Foreign Reference 8 View
2003-01-31 FOR Foreign Reference 20 View
2003-01-31 FOR Foreign Reference 19 View
2002-09-13 CTNF Non-Final Rejection 4 View
2002-09-13 892 List of references cited by examiner 1 View
2002-07-24 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2002-07-24 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2002-06-05 CTNF Non-Final Rejection 6 View
2002-06-05 892 List of references cited by examiner 1 View
2002-06-05 1449 List of References cited by applicant and considered by examiner 1 View
2002-05-14 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2002-05-14 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2002-05-14 CLM Claims 1 View
2002-05-14 REM Applicant Arguments/Remarks Made in an Amendment 21 View
2002-05-14 SPEC Specification 12 View
2002-05-14 CLM Claims 2 View
2002-05-14 ABST Abstract 1 View
2002-01-04 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2002-01-04 CLM Claims 1 View
2002-01-04 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2002-01-04 CLM Claims 2 View
2002-01-04 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2002-01-04 SPEC Specification 12 View
2002-01-04 CLM Claims 2 View
2002-01-04 ABST Abstract 1 View
2002-01-04 REM Applicant Arguments/Remarks Made in an Amendment 15 View
2001-12-18 LET. Miscellaneous Incoming Letter 1 View
2001-12-18 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2001-12-18 FOR Foreign Reference 1 View
2001-12-17 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2001-12-12 CTRS Requirement for Restriction/Election 5 View
2001-10-25 PA.. Power of Attorney 4 View
2001-07-20 LET. Miscellaneous Incoming Letter 1 View
2001-07-20 DRW Drawings-only black and white line drawings 3 View
2001-07-09 LET. Miscellaneous Incoming Letter 2 View
2001-07-09 SPEC Specification 12 View
2001-07-09 CLM Claims 2 View
2001-07-09 ABST Abstract 1 View
2001-07-09 SPEC Specification 15 View
2001-05-23 CTMS Miscellaneous Action with shortened statutory period (SSP) 1 View
2001-02-13 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-02-13 SRFW Search information including classification, databases and other search related notes 1 View
2001-02-13 FWCLM Index of Claims 1 View
2001-02-13 TRNA Transmittal of New Application 1 View
2001-02-13 DRW Drawings-only black and white line drawings 4 View
2001-02-13 SPEC Specification 13 View
2001-02-13 CLM Claims 2 View
2001-02-13 ABST Abstract 1 View
2001-02-13 OATH Oath or Declaration filed 2 View
2001-02-13 WFEE Fee Worksheet (SB06) 2 View
2001-02-13 WFEE Fee Worksheet (SB06) 1 View
2001-02-13 WCLM Claims Worksheet (PTO-2022) 1 View
2001-02-13 TRNA Transmittal of New Application 1 View
2001-02-13 SPEC Specification 13 View
2001-02-13 CLM Claims 2 View
2001-02-13 ABST Abstract 1 View
2001-02-13 DRW Drawings-only black and white line drawings 4 View
2001-02-13 OATH Oath or Declaration filed 2 View
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Quick Facts
App. No.
09/783,069
Filed
2001-02-13
Granted
2004-06-29
Pub. No.
US20020111026A1
Examiner
LE, THAO P
Art Unit
2818
PTA
-235 days