Granted Patent
Utility
US 6,552,408
· Confirmation No. 8806
METHODS, APPARATUSES, AND SUBSTRATE ASSEMBLY STRUCTURES FOR FABRICATING MICROELECTRONIC COMPONENTS USING MECHANICAL AND CHEMICAL-MECHANICAL PLANARIZATION PROCESSES
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-02-20 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-02-20 | ADS |
Application Data Sheet | 2 | View | |
| 2001-02-20 | A.PE |
Preliminary Amendment | 2 | View | |
| 2001-02-20 | SPEC |
Specification | 16 | View | |
| 2001-02-20 | CLM |
Claims | 17 | View | |
| 2001-02-20 | ABST |
Abstract | 1 | View | |
| 2001-02-20 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2001-02-20 | OATH |
Oath or Declaration filed | 10 | View |
Inventors
Karl M. Robinson
Boise, ID
Pai-Hung Pan
Boise, ID
Attorneys & Agents of Record
Classification
USPC
257/509
B24B37/013
H10W10/014
H10W10/17
H10P90/1914
H10P95/062
B24B49/16
Prosecution
- Examiner
- TRAN, BINH X
- Art Unit
- 1765
- Customer No.
- 27076
- Docket No.
- 500451.03
- Confirmation No.
- 8806
Publication
- Pub. No.
- US20010010972A1
- Pub. Date
- 2001-08-02
Patent Term Adjustment
-120days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-01-04
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Quick Facts
- Patent No.
- US 6,552,408
- App. No.
- 09/789,352
- Filed
- 2001-02-20
- Granted
- 2003-04-22
- Pub. No.
- US20010010972A1
- Examiner
- TRAN, BINH X
- Art Unit
- 1765
- PTA
- -120 days
External Links