Granted Patent
Utility
US 6,645,865
· Confirmation No. 2487
METHODS, APPARATUSES AND SUBSTRATE ASSEMBLY STRUCTURES FOR FABRICATING MICROELECTRONIC COMPONENTS USING MECHANICAL AND CHEMICAL-MECHANICAL PLANARIZATION PROCESSES
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2005-01-27 | COCOUT |
Certificate of Correction - Post Issue Communication | 1 | View | |
| 2003-09-05 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2002-10-30 | TRNA |
Transmittal of New Application | 4 | View | |
| 2002-10-30 | ADS |
Application Data Sheet | 2 | View | |
| 2002-10-30 | A.PE |
Preliminary Amendment | 4 | View | |
| 2002-10-30 | SPEC |
Specification | 16 | View | |
| 2002-10-30 | CLM |
Claims | 17 | View | |
| 2002-10-30 | ABST |
Abstract | 1 | View | |
| 2002-10-30 | DRW |
Drawings-only black and white line drawings | 7 | View | |
| 2002-10-30 | OATH |
Oath or Declaration filed | 10 | View |
Inventors
Karl M. Robinson
Boise, ID
Pai-Hung Pan
Boise, ID
Attorneys & Agents of Record
Classification
USPC
438/692
B24B37/013
H10W10/014
H10W10/17
H10P90/1914
H10P95/062
B24B49/16
Prosecution
- Examiner
- TRAN, BINH X
- Art Unit
- 1765
- Docket No.
- 500451.05
- Confirmation No.
- 2487
Publication
- Pub. No.
- US20030054651A1
- Pub. Date
- 2003-03-20
Patent Term Adjustment
-3days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2010-01-04
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Quick Facts
- Patent No.
- US 6,645,865
- App. No.
- 10/285,134
- Filed
- 2002-10-30
- Granted
- 2003-11-11
- Pub. No.
- US20030054651A1
- Examiner
- TRAN, BINH X
- Art Unit
- 1765
- PTA
- -3 days
External Links