Surface inspection apparatus and method thereof
View Patent ↗The invention provides a surface inspection apparatus and a method for inspecting the surface of a sample that are capable of inspecting discriminatingly between the scratch of various configuration and the adhered foreign object that occur on the surface of a work target when the work target (for example, an insulating film on a semiconductor substrate) is subjected to polishing process such as CMP or grinding process in semiconductor manufacturing process or magnetic head manufacturing process. In the invention, the scratch and foreign object that occur on the polished or ground surface of the sample is epi-illuminated and slant-illuminated by use of approximately same light flux, the difference between the scattered light intensity emitted from the shallow scratch and that from the foreign object when epi-illumination is applied and slant illumination is applied to thereby discriminate between the shallow scratch and the foreign object, and the directionality of the scattered light when the epi-illumination is applied and the slant illumination is applied is detected to thereby discriminate between the linear scratch and the foreign object.
1. A surface inspection apparatus comprising:
a stage on which an inspection target is placed;
an illumination optical system having an epi-illumination system for epi-illuminating the inspection target placed on the stage and a slant illumination system for slant-illuminating a surface of the inspection target;
a detection optical system having a first converging optical system for converging first scattered light that comes in a direction of a first desired angle with respect to the surface of the inspection target out of the first reflected light emitted from the inspection target epi-illuminated by means of the epi-illumination system of the illumination optical system and the second scattered light that comes in the direction of the first desired angle out of second reflected light emitted from the inspection target slant-illuminated by means of the slant illumination system of the illumination optical system, and having a first photoelectric conversion means for receiving the first and second scattered lights converged by means of the first converging optical system to thereby converting the received lights to first and second luminance signals;
a comparison discrimination unit for discriminating a defect on the inspection target based on a relation between the first luminance signal and the second luminance signal that have been converted by means of the photoelectric conversion means of the detection optical system; and
an output unit for supplying the result obtained by means of the comparison discrimination unit;
wherein the detection optical system has a second converging optical system and a second photoelectric conversion means additionally, the second converging optical system converges third scattered light that comes in an angular direction lower than the first scattered light out of the first reflected light reflected from the inspection target that is epi-illuminated and fourth scattered light that comes in an angular direction lower than the second scattered light out of the second reflected light reflected from the inspection target that is slant-illuminated, and the second photoelectric conversion means receives the third and fourth scattered lights converged by means of second converging optical system and converts the received lights to third and fourth luminance signals respectively.
2. The surface inspection apparatus according to claim 1 , wherein the direction of the first desired angle with respect to the surface of the inspection target is approximately coincident with a direction of an angle of the optical axis direction of the epi-illumination system used for epi-illuminating the inspection target.
3. The surface inspection apparatus according to claim 1 , wherein the direction of the first desired direction with respect to the surface of the inspection target is in the angular range from an optical axis direction of the epi-illumination system used for epi-illuminating the inspection target to an optical axis direction of the slant illumination system used for slant illuminating the surface of the inspection target.
4. The surface inspection apparatus according to claim 1 , wherein the detection optical system has a third converging optical system and the third photoelectric conversion means additionally, the third converging optical system converges the fifth scattered light that comes in the angular direction lower than the fourth scattered light out of the second reflected light reflected from the inspection target that is slant-illuminated, and the third photoelectric conversion means receives the fifth Hi scattered light converged by means of the third converging optical system and converts the received light to the fifth luminance signal.
5. The surface inspection apparatus according to claim 4 , wherein the third converging optical system additionally converges sixth scattered light that comes in an angular direction lower than the third scattered light out of the first reflected light reflected from the inspection target that is epi-illuminated, and the third photoelectric conversion means receives the sixth scattered light converged by means of the third converging optical system and coverts the received light to a sixth luminance signal.
6. The surface inspection apparatus according to claim 1 , wherein the comparison discrimination unit discriminates a defect on the inspection target as one of a concave defect and convex defect.
7. The surface inspection apparatus according to claim 1 , wherein the comparison discrimination unit classifies a concave defect on the inspection target into at least one of predetermined defect types.