IP Library › Granted Patent US 6,825,303
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US 6,825,303 · Confirmation No. 4668

INTEGRATION OF LOW EPSILON THIN FILMS AND TA INTO CU DUAL DAMASCENE

Inventor: Chung J. Lee
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Code Description Pages PDF
2005-01-18 LET. Miscellaneous Incoming Letter 1 View
2005-01-18 PA.. Power of Attorney 2 View
2004-09-10 IFEE Issue Fee Payment (PTO-85B) 3 View
2004-08-25 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2004-08-25 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2004-08-25 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2004-08-25 BIB Bibliographic Data Sheet 1 View
2004-08-25 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-08-25 FWCLM Index of Claims 1 View
2004-08-25 SRFW Search information including classification, databases and other search related notes 1 View
2004-03-02 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2004-02-20 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2004-02-20 CLM Claims 4 View
2004-02-20 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2004-02-05 LET. Miscellaneous Incoming Letter 1 View
2004-02-05 PA.. Power of Attorney 4 View
2003-12-08 CTFR Final Rejection 7 View
2003-12-08 1449 List of References cited by applicant and considered by examiner 4 View
2003-09-05 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-09-05 CLM Claims 6 View
2003-09-05 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-06-20 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2003-06-20 FOR Foreign Reference 12 View
2003-06-20 FOR Foreign Reference 16 View
2003-06-20 FOR Foreign Reference 10 View
2003-06-20 FOR Foreign Reference 4 View
2003-06-20 FOR Foreign Reference 7 View
2003-06-20 FOR Foreign Reference 59 View
2003-06-20 FOR Foreign Reference 53 View
2003-06-20 FOR Foreign Reference 24 View
2003-06-20 FOR Foreign Reference 69 View
2003-06-20 FOR Foreign Reference 70 View
2003-06-20 FOR Foreign Reference 55 View
2003-06-18 CTNF Non-Final Rejection 7 View
2003-06-18 NFDR Notice of Formal Drawings Required 1 View
2003-03-25 LET. Miscellaneous Incoming Letter 1 View
2003-03-25 DRW Drawings-only black and white line drawings 1 View
2003-03-25 XT/ Extension of Time 1 View
2003-03-25 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-03-25 CLM Claims 4 View
2003-03-25 REM Applicant Arguments/Remarks Made in an Amendment 12 View
2003-03-25 APPENDIX Appendix to the specification 3 View
2002-11-20 CTNF Non-Final Rejection 6 View
2002-11-20 892 List of references cited by examiner 1 View
2002-11-20 1449 List of References cited by applicant and considered by examiner 1 View
2002-11-20 NFDR Notice of Formal Drawings Required 2 View
2002-08-27 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2002-07-17 CTRS Requirement for Restriction/Election 8 View
2001-07-09 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2001-02-26 TRNA Transmittal of New Application 2 View
2001-02-26 SPEC Specification 26 View
2001-02-26 CLM Claims 8 View
2001-02-26 ABST Abstract 1 View
2001-02-26 DRW Drawings-only black and white line drawings 3 View
2001-02-26 OATH Oath or Declaration filed 1 View
2001-02-26 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2001-02-26 SRFW Search information including classification, databases and other search related notes 1 View
2001-02-26 FWCLM Index of Claims 1 View
2001-02-26 TRNA Transmittal of New Application 2 View
2001-02-26 DRW Drawings-only black and white line drawings 3 View
2001-02-26 SPEC Specification 26 View
2001-02-26 CLM Claims 8 View
2001-02-26 ABST Abstract 1 View
2001-02-26 OATH Oath or Declaration filed 1 View
2001-02-26 WFEE Fee Worksheet (SB06) 1 View
2001-02-26 WFEE Fee Worksheet (SB06) 1 View
2001-02-26 WCLM Claims Worksheet (PTO-2022) 1 View
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Quick Facts
Patent No.
US 6,825,303
App. No.
09/795,217
Filed
2001-02-26
Granted
2004-11-30
Pub. No.
US20020120083A1
Art Unit
1713
PTA
-33 days