Granted Patent
Utility
US 6,667,806
· Confirmation No. 8475
PROCESS AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2003-10-15 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2001-03-02 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-03-02 | SPEC |
Specification | 19 | View | |
| 2001-03-02 | CLM |
Claims | 4 | View | |
| 2001-03-02 | ABST |
Abstract | 1 | View | |
| 2001-03-02 | DRW |
Drawings-only black and white line drawings | 9 | View |
Inventors
Attorneys & Agents of Record
Classification
USPC
356/399
G03F7/70633
H10P74/23
Prosecution
- Examiner
- STOCK JR, GORDON J
- Art Unit
- 2877
- Customer No.
- 20457
- Docket No.
- 500.39797X00
- Confirmation No.
- 8475
Foreign Priority
2000-283776
·
2000-09-13
·
JAPAN
Publication
- Pub. No.
- US20020048020A1
- Pub. Date
- 2002-04-25
Patent Term Adjustment
-30days
No related applications found.
CHANGE OF ADDRESS
Recorded 2017-11-29
MERGER/CHANGE OF NAME
Recorded 2011-08-31
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-06-11
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Quick Facts
- Patent No.
- US 6,667,806
- App. No.
- 09/796,613
- Filed
- 2001-03-02
- Granted
- 2003-12-23
- Pub. No.
- US20020048020A1
- Examiner
- STOCK JR, GORDON J
- Art Unit
- 2877
- PTA
- -30 days
External Links