IP Library › Granted Patent US 6,531,402
Granted Patent Utility
US 6,531,402 · Confirmation No. 2484

METHOD FOR ETCHING ORGANIC FILM, METHOD FOR FABRICATING SEMICONDUCTOR DEVICE AND PATTERN FORMATION METHOD

Inventor: Hideo Nakagawa
Patented Case View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2014-08-12 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2014-08-12 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2014-07-18 PA.. Power of Attorney 1 View
2014-07-18 MFEE.C.AD Maintenance Fee Address Change 1 View
2014-07-18 N417 Electronic Filing System Acknowledgment Receipt 2 View
2014-07-18 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2001-03-06 TRNA Transmittal of New Application 2 View
2001-03-06 ADS Application Data Sheet 1 View
2001-03-06 SPEC Specification 61 View
2001-03-06 CLM Claims 3 View
2001-03-06 ABST Abstract 1 View
2001-03-06 DRW Drawings-only black and white line drawings 16 View
2001-03-06 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,531,402
App. No.
09/798,912
Filed
2001-03-06
Granted
2003-03-11
Pub. No.
US20010046781A1
Art Unit
2812
PTA
0 days