IP Library › Granted Patent US 6,638,833
Granted Patent Utility
US 6,638,833 · Confirmation No. 1879

PROCESS FOR THE FABRICATION OF INTEGRATED DEVICES WITH REDUCTION OF DAMAGE FROM PLASMA

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 Code Description Pages PDF
2003-08-12 IFEE Issue Fee Payment (PTO-85B) 1 View
2003-08-12 LET. Miscellaneous Incoming Letter 1 View
2001-03-09 TRNA Transmittal of New Application 2 View
2001-03-09 SPEC Specification 7 View
2001-03-09 CLM Claims 5 View
2001-03-09 ABST Abstract 1 View
2001-03-09 DRW Drawings-only black and white line drawings 3 View
2001-03-09 TRNA Transmittal of New Application 2 View
2001-03-09 SPEC Specification 7 View
2001-03-09 CLM Claims 5 View
2001-03-09 ABST Abstract 1 View
2001-03-09 DRW Drawings-only black and white line drawings 3 View
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Quick Facts
Patent No.
US 6,638,833
App. No.
09/804,693
Filed
2001-03-09
Granted
2003-10-28
Art Unit
2824
PTA
-132 days