IP Library › Granted Patent US 6,689,515
Granted Patent Utility
US 6,689,515 · Confirmation No. 4021

PHASE-SHIFTING PHOTOMASK BLANK, PHASE-SHIFTING PHOTOMASK, METHOD FOR PRODUCING THEM AND APPARATUS FOR MANUFACTURING THE BLANK

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2003-10-20 IFEE Issue Fee Payment (PTO-85B) 1 View
2001-03-15 TRNA Transmittal of New Application 3 View
2001-03-15 SPEC Specification 45 View
2001-03-15 CLM Claims 5 View
2001-03-15 ABST Abstract 1 View
2001-03-15 DRW Drawings-only black and white line drawings 14 View
2001-03-15 OATH Oath or Declaration filed 5 View
2001-03-15 TRNA Transmittal of New Application 3 View
2001-03-15 SPEC Specification 45 View
2001-03-15 CLM Claims 5 View
2001-03-15 ABST Abstract 1 View
2001-03-15 DRW Drawings-only black and white line drawings 14 View
2001-03-15 OATH Oath or Declaration filed 5 View
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Quick Facts
Patent No.
US 6,689,515
App. No.
09/805,902
Filed
2001-03-15
Granted
2004-02-10
Pub. No.
US20010018154A1
Art Unit
1756
PTA
-31 days