IP Library › Granted Patent US 6,551,750
Granted Patent Utility
US 6,551,750 · Confirmation No. 6770

SELF-ALIGNED FABRICATION TECHNIQUE FOR TRI-TONE ATTENUATED PHASE-SHIFTING MASKS

Inventor: Christophe Pierrat
Patented Case View Patent ↗ View Publication ↗
⬇ PDF
 Code Description Pages PDF
2001-03-16 TRNA Transmittal of New Application 2 View
2001-03-16 SPEC Specification 17 View
2001-03-16 CLM Claims 8 View
2001-03-16 ABST Abstract 1 View
2001-03-16 DRW Drawings-only black and white line drawings 9 View
2001-03-16 OATH Oath or Declaration filed 2 View
2001-03-16 TRNA Transmittal of New Application 2 View
2001-03-16 SPEC Specification 17 View
2001-03-16 CLM Claims 8 View
2001-03-16 ABST Abstract 1 View
2001-03-16 DRW Drawings-only black and white line drawings 9 View
2001-03-16 OATH Oath or Declaration filed 2 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,551,750
App. No.
09/810,823
Filed
2001-03-16
Granted
2003-04-22
Pub. No.
US20020132174A1
Art Unit
1756
PTA
0 days