Semiconductor wafer made from silicon and method for producing the semiconductor wafer
View Patent ↗A semiconductor wafer made from silicon which is doped with hydrogen. The hydrogen concentration is less than 5*10 16 atcm −3 and greater than 1*10 12 atcm −3 . A method for producing a semiconductor wafer from silicon includes separating the semiconductor wafer from a silicon single crystal, with the single silicon crystal being pulled from a melt, in the presence of hydrogen, using the Czochralski method. The hydrogen partial pressure during the pulling of the single silicon crystal is less than 3 mbar.
1. A method for producing a silicon semiconductor wafer comprising
pulling a silicon single crystal from a melt to form voids of aggregated vacancy defects, in the presence of hydrogen, using the Czochralski method, wherein the silicon single crystal is pulled under a hydrogen partial pressure of less than 3 mbar thus substantially preventing oxygen from oxidizing internal surfaces of the voids;
doping the silicon single crystal with nitrogen and producing a nitrogen concentration of 5*10 12 atcm −3 to 5*10 15 atcm −3 ; and
separating the silicon semiconductor wafer from the silicon single crystal.
2. The method as claimed in claim 1 , comprising
placing a cooled heat shield around the silicon single crystal; and
cooling the silicon single crystal with the heat shield, for a period of time within which the silicon single crystal cools from a temperature of 1050° C. to a temperature of 900° C. in less than 120 mm.
3. The method as claimed in claim 1 , comprising
subjecting the semiconductor wafer to a heat treatment in an atmosphere which contains less than 3% by volume of hydrogen and the balance substantially being argon.
4. The method as claimed in claim 2 , comprising
subjecting the semiconductor wafer to an oxidation treatment.