IP Library Patent Application 09817929
Patent Application Utility
App. No. 09/817,929 · Confirmation No. 3958

Method for evaluating a wafer cleaning operation

Inventor: Leslie G. Stanton
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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Code Description Pages PDF
2001-03-27 TRNA Transmittal of New Application 4 View
2001-03-27 ADS Application Data Sheet 1 View
2001-03-27 SPEC Specification 22 View
2001-03-27 CLM Claims 6 View
2001-03-27 ABST Abstract 1 View
2001-03-27 DRW Drawings-only black and white line drawings 1 View
2001-03-27 OATH Oath or Declaration filed 4 View
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Quick Facts
App. No.
09/817,929
Filed
2001-03-27
Pub. No.
US20020142617A1
Examiner
DANG, PHUC T
Art Unit
2818