Patent Application
Utility
App. No. 09/819,806
· Confirmation No. 2655
ELECTRON BEAM EXPOSURE MASK AND PATTERN DESIGNING METHOD THEREOF
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-03-28 | TRNA |
Transmittal of New Application | 1 | View | |
| 2001-03-28 | SPEC |
Specification | 20 | View | |
| 2001-03-28 | CLM |
Claims | 3 | View | |
| 2001-03-28 | ABST |
Abstract | 1 | View | |
| 2001-03-28 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2001-03-28 | OATH |
Oath or Declaration filed | 1 | View |
Inventors
Hiroshi Yamashita
Tokyo, JAPAN
Fumihiro Koba
Tokyo, JAPAN
Attorneys & Agents of Record
Classification
USPC
430/5
H10P76/00
G03F1/20
H01J2237/31788
H01J2237/31794
Y10S430/143
Prosecution
- Examiner
- YOUNG, CHRISTOPHER G
- Art Unit
- 1756
- Customer No.
- 26339
- Docket No.
- FUM-03201
- Confirmation No.
- 2655
Foreign Priority
2000-088392
·
2000-03-28
·
JAPAN
Publication
- Pub. No.
- US20010028984A1
- Pub. Date
- 2001-10-11
Patent Term Adjustment
-93days
No related applications found.
from
NEC CORPORATION
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-02-25
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-03-28
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Quick Facts
- App. No.
- 09/819,806
- Filed
- 2001-03-28
- Granted
- 2002-09-10
- Pub. No.
- US20010028984A1
- Examiner
- YOUNG, CHRISTOPHER G
- Art Unit
- 1756
- PTA
- -93 days
External Links