Granted Patent
Utility
US 6,514,424
· Confirmation No. 2327
PROCESS FOR THE DOUBLE-SIDE POLISHING OF SEMICONDUCTOR WAFERS AND CARRIER FOR CARRYING OUT THE PROCESS
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-04-04 | TRNA |
Transmittal of New Application | 2 | View | |
| 2001-04-04 | A.PE |
Preliminary Amendment | 7 | View | |
| 2001-04-04 | SPEC |
Specification | 35 | View | |
| 2001-04-04 | CLM |
Claims | 5 | View | |
| 2001-04-04 | ABST |
Abstract | 1 | View | |
| 2001-04-04 | DRW |
Drawings-only black and white line drawings | 3 | View | |
| 2001-04-04 | OATH |
Oath or Declaration filed | 4 | View |
Inventors
Guido Wenski
Burghausen, GERMANY
Gerhard Heier
Burghausen, GERMANY
Wolfgang Winkler
Tittmoning, GERMANY
Thomas Altmann
Haiming, GERMANY
Attorneys & Agents of Record
Classification
USPC
216/38
H10P90/129
B24B41/067
B24B37/0056
B24B37/08
Prosecution
- Examiner
- POWELL, WILLIAM A
- Art Unit
- 1765
- Docket No.
- WENSKI ET AL 5
- Confirmation No.
- 2327
Foreign Priority
100 23 002.4
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2000-05-11
·
GERMANY
Publication
- Pub. No.
- US20010047978A1
- Pub. Date
- 2001-12-06
Patent Term Adjustment
0days
No related applications found.
from
SILTRONIC AG
CORRECTIVE ASSIGNMENT TO CORRECT THE DATE OF THE CHANGE OF ADDRESS FROM 03/12/2020 TO 12/03/2020 PREVIOUSLY RECORDED AT REEL: 056719 FRAME: 0881. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT.
Recorded 2021-07-01
CHANGE OF NAME
Recorded 2004-07-30
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-04-04
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Quick Facts
- Patent No.
- US 6,514,424
- App. No.
- 09/826,135
- Filed
- 2001-04-04
- Granted
- 2003-02-04
- Pub. No.
- US20010047978A1
- Examiner
- POWELL, WILLIAM A
- Art Unit
- 1765
- PTA
- 0 days
External Links