Patent Application
Utility
App. No. 09/826,214
· Confirmation No. 2600
DUV SCANNER LINEWIDTH CONTROL BY MASK ERROR FACTOR COMPENSATION
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2001-04-04 | TRNA |
Transmittal of New Application | 3 | View | |
| 2001-04-04 | SPEC |
Specification | 30 | View | |
| 2001-04-04 | CLM |
Claims | 15 | View | |
| 2001-04-04 | ABST |
Abstract | 1 | View | |
| 2001-04-04 | DRW |
Drawings-only black and white line drawings | 10 | View | |
| 2001-04-04 | OATH |
Oath or Declaration filed | 1 | View |
Inventors
Pradeep K. Govil
Norwalk, CT
James Tsacoyeanes
Southbury, CT
Attorneys & Agents of Record
Classification
USPC
355/52
H10P76/00
G03F7/70066
G03F7/70091
G03F7/70358
G03F7/70558
G03F7/70625
Prosecution
- Examiner
- ESPLIN, DAVID B
- Art Unit
- 2851
- Docket No.
- SVG-4038
- Confirmation No.
- 2600
Publication
- Pub. No.
- US20020145719A1
- Pub. Date
- 2002-10-10
Patent Term Adjustment
-30days
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2001-04-04
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Quick Facts
- App. No.
- 09/826,214
- Filed
- 2001-04-04
- Granted
- 2003-06-03
- Pub. No.
- US20020145719A1
- Examiner
- ESPLIN, DAVID B
- Art Unit
- 2851
- PTA
- -30 days
External Links