Patent Assignment
Reel/Frame 014734/0588
Merger
Recorded: 2004-06-16
Pages: 6
Assignor
SVG LITHOGRAPHY SYSTEMS, INC.
Executed: 2001-12-31
Assignee
ASML US, INC.
8555 SOUTH RIVER PARKWAY, TEMPE, ARIZONA, 85284
Covered Properties
(35)
Method and Apparatus for Optical System Adjustments
Patent:
4,693,569 →
Application:
06/308,647 →
Wafer Transferring Chuck Assembly
Patent:
4,530,635 →
Application:
06/504,718 →
Fine Alignment System
Patent:
4,606,643 →
Application:
06/505,592 →
High Voltage Operational Amplifier
Patent:
4,580,104 →
Application:
06/621,839 →
Ring Field Projection System
Patent:
4,711,535 →
Application:
06/732,764 →
Lens Assembly
Patent:
4,586,787 →
Application:
06/780,786 →
Optical Figuring by Plasma Assisted Chemical Transport and Etching Apparatus Therefor
Patent:
4,668,366 →
Application:
06/790,673 →
Short Arc Lamp Image Transformer
Patent:
4,734,829 →
Application:
06/796,339 →
Universal Edged-Based Wafer Alignment Apparatus
Patent:
4,907,035 →
Application:
06/842,145 →
Adjustable Mount for Large Mirrors
Patent:
4,681,408 →
Application:
06/856,881 →
Reverse Dark Field Alignment System for Scanning Lithographic Aligner
Patent:
4,697,087 →
Application:
06/868,506 →
High Resonance Adjustable Mirror Mount
Patent:
4,726,671 →
Application:
06/876,068 →
Reticle Transporter
Patent:
4,719,705 →
Application:
06/877,817 →
High Speed Reticle Change System
Patent:
4,760,429 →
Application:
06/927,202 →
Wafer Handling System
Patent:
4,846,626 →
Application:
07/012,538 →
Microlithographic Apparatus
Patent:
4,952,858 →
Application:
07/198,545 →
Optical Reduction System
Patent:
4,953,960 →
Application:
07/223,968 →
Air Gauge Sensor
Patent:
4,953,388 →
Application:
07/301,088 →
Wafer Handling System
Patent:
4,973,217 →
Application:
07/351,741 →
Wafer Handling System
Patent:
5,085,558 →
Application:
07/577,209 →
Wafer Handling System
Patent:
5,193,972 →
Application:
07/790,427 →
Broad Band Optical Reduction System Using Matched Multiple Refractive Element Materials
Patent:
5,212,593 →
Application:
07/831,818 →
Off Axis Alignment System for Scanning Photolithography
Patent:
5,477,057 →
Application:
08/292,096 →
Illumination System Having Spatially Separate Vertical and Horizontal Image Planes for Use in Photolithography
Patent:
5,724,122 →
Application:
08/448,994 →
Line Width Insensitive Wafer Target Detection
Patent:
5,920,396 →
Application:
08/730,787 →
Moving Interferometer Wafer Stage
Patent:
5,757,160 →
Application:
08/785,764 →
Lamp Stablity Diagnostic System
Patent:
5,818,575 →
Application:
08/835,845 →
Vacuum Assisted Debris Removal System
Patent:
5,973,764 →
Application:
08/878,633 →
Reflective Fly's Eye Condenser for Euv Lithography
Patent:
6,195,201 →
Application:
09/238,976 →
Line Width Insentive Wafer Target Detection in Two Directions
Patent:
5,966,215 →
Application:
09/290,217 →
In Situ Projection Optic Metrology Method and Apparatus
Patent:
6,360,012 →
Application:
09/344,664 →
Multi-Channel Grating Interference Alignment Sensor
Patent:
6,469,793 →
Application:
09/371,337 →
Euv Reticle Thermal Management
Patent:
6,445,439 →
Application:
09/473,259 →
High Numerical Aperture Catadioptric Lens
Patent:
6,486,940 →
Application:
09/620,886 →
Duv Scanner Linewidth Control by Mask Error Factor Compensation
Related Assignments
(25)
Other recorded transfers of the patents in this record — the chain of ownership.
Assignment of Assignors Interest.
Oct 5, 1981
From: OFFNER, ABE
To: PERKIN-ELMER CORPORATION, THE, A CORP. OF N.Y.
Reel/Frame 003931/0818 →
Assignment of Assignors Interest.
Jun 15, 1983
From: ENGELBRECHT, OREST; LAGANZA, JOSEPH L.
To: PERKIN-ELMER CORPORATION, THE
Reel/Frame 004142/0369 →
Assignment of Assignors Interest.
Jun 20, 1983
From: TAM, WAI-MING
To: PERKIN-ELMER CORPORATION THE
Reel/Frame 004143/0857 →
Assignment of Assignors Interest.
Jun 18, 1984
From: LIU, RAYMOND C.
To: PERKIN-ELMER CORPORATION, THE, MAIN AVE., NORWALK, CT. 06856 A CORP.
Reel/Frame 004275/0904 →
Assignment of Assignors Interest.
May 10, 1985
From: SHAFER, DAVID R.
To: PERKINS-ELMER CORPORATION, THE
Reel/Frame 004427/0031 →
Assignment of Assignors Interest.
Sep 27, 1985
From: FIANDRA, CARLO L.; DESCHENAUX, WARREN
To: PERKIN-ELMER CORPORATION THE 761 MAIN AVE. NORWALK, CT 06859-0074 A CORP OF NY
Reel/Frame 004462/0945 →
Assignment of Assignors Interest.
Oct 23, 1985
From: ZAROWIN, CHARLES B.
To: PERKIN-ELMER CORPORTION THE, 761 MAIN AVENUE, NORWALK, CONNECTICUT, 06859-0074, A CORP OF NEW YORK
Reel/Frame 004471/0937 →
Assignment of Assignors Interest.
Nov 12, 1985
From: WU, FREDERICK Y.; MARKLE, DAVID A.
To: PERKIN-ELMER CORPORATION THE, A CORP. OF NEW YORK
Reel/Frame 004481/0997 →
Assignment of Assignors Interest.
Apr 28, 1986
From: AHMAD, ANEES; HUSE, RICHARD
To: PERKIN-ELMER CORPORATION THE, A CORP OF NEW YORK
Reel/Frame 004545/0266 →
Assignment of Assignors Interest.
May 30, 1986
From: WU, FREDERICK Y.
To: PERKIN-ELMER CORPORATION THE, A CORP. OF NEW YORK
Reel/Frame 004619/0352 →
Assignment of Assignors Interest.
Jun 19, 1986
From: AHMAD, ANEES; HUSE, RICHARD L.
To: PERKIN-ELMER CORPORATION THE
Reel/Frame 004569/0296 →
Assignment of Assignors Interest.
Jun 24, 1986
From: LAGANZA, JOSEPH L.; ENGELBRECHT, OREST
To: PERKIN-ELMER CORPORATION, THE
Reel/Frame 004579/0185 →
Assignment of Assignors Interest.
Nov 5, 1986
From: O'CONNOR, GEOFFREY
To: PERKIN-ELMER CORPORATION THE
Reel/Frame 004626/0447 →
Assignment of Assignors Interest.
Feb 9, 1987
From: ENGELBRECHT, OREST
To: PERKIN-ELMER CORPORATION, THE, A CORP. OF NEW YORK
Reel/Frame 004669/0161 →
Assignment of Assignors Interest.
May 18, 1988
From: GALBURT, DANIEL N.
To: PERKIN-ELMER CORPORATION, THE
Reel/Frame 004889/0600 →
Assignment of Assignors Interest.
Jul 15, 1988
From: WILLIAMSON, DAVID M.
To: PERKIN-ELMER, THE CORPORATION, 761 MAIN AVENUE, NORWALK, CT 06859, A CORP. OF NY
Reel/Frame 004926/0423 →
Assignment of Assignors Interest.
Jan 25, 1989
From: BARADA, ANDREW H.
To: PERKIN-ELMER CORPORATION, THE, A CORP. OF NY
Reel/Frame 005034/0504 →
Assignment of Assignors Interest.
Aug 9, 1990
From: PERKIN-ELMER CORPORATION, THE,
To: SVG LITHOGRAPHY, INC., A CORP OF DE
Reel/Frame 005424/0111 →
Assignment of Assignors Interest.
Mar 6, 1992
From: WILLIAMSON, DAVID; DESAI, SATISH
To: SVG LITHOGRAPHY SYSTEMS, INC.
Reel/Frame 006032/0792 →
Assignment of Assignor's Interest
Aug 17, 1994
From: ANGELEY, DAVID; DRAZKIEWICZ, STAN; GALLATIN, GREGG
To: SVG LITHOGRAPHY SYSTEMS, INC.
Reel/Frame 007116/0916 →
Assignment of Assignor's Interest
May 24, 1995
From: OSKOTSY, MARK L.
To: SVG LITHOGRAPHY SYSTEMS, INC.
Reel/Frame 007500/0624 →
Assignment of Assignor's Interest
Oct 16, 1996
From: MARKOYA, LOUIS; LYONS, JOSEPH
To: SVG LITHOGRAPHY SYSTEMS, INC.
Reel/Frame 008304/0666 →
Conversion
Jun 16, 2004
From: ASML US, INC.
To: ASML US, LLC
Reel/Frame 014734/0603 →
Merger
Jun 16, 2004
From: ASM LITHOGRAPHY, INC. AND ASML US, LLC
To: ASML US, INC.
Reel/Frame 014734/0615 →
Confirmatory Assignment
Jun 16, 2004
From: ASML US, INC.
To: ASML HOLDING N.V.
Reel/Frame 014734/0624 →