CMP POLISHING COMPOSITION FOR SEMICONDUCTOR DEVICES CONTAINING ORGANIC POLYMER PARTICLES

Inventors: Wesley D. Costas, Craig D. Lack, Daniel A. Saucy

Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗

	Code	Description	Pages	PDF
2001-04-05	`TRNA`	Transmittal of New Application	1	View
2001-04-05	`SPEC`	Specification	11	View
2001-04-05	`CLM`	Claims	3	View
2001-04-05	`ABST`	Abstract	1	View

Inventors

Wesley D. Costas Bear, DE

Craig D. Lack Wilmington, DE

Daniel A. Saucy Harleysville, PA

Attorneys & Agents of Record

KONRAD KAEDING Reg. 32035 Attorney · E I DUPONT DE NEWMOURS AND COMPANY

KENNETH BENSON Reg. 27971 Agent

GERALD KITA Reg. 24125 Attorney

BLAKE BIEDERMAN Reg. 34124 Attorney · DUPONT E&I

JONATHAN BASKIN Reg. 39499 Attorney · BURNS, DOANE, SWECKER

ROGER MIAO Reg. 53323 Agent · DUPONT DE NEMOURS, INC.

SHAORONG CHEN Reg. 55054 Attorney · DUPONT

JENAFER EVANS Reg. 58177 Agent · DUPONT SPECIALTY PRODUCTS USA, LLC

GORDON CAMPBELL Reg. 72624 Agent · DUPONT LEGAL

Classification

USPC 451/41

C23F3/00 H10P52/403 C09G1/02 C09K3/1409 C09K3/1463

Prosecution

Publication

Patent Term Adjustment

-27days

ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC.

from RODEL HOLDINGS, INC.

CHANGE OF NAME Recorded 2004-06-15

RODEL HOLDINGS, INC.

from LACK, CRAIG D., SAUCY, DANIEL A., COSTAS, WESLEY D.

ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded 2001-07-02

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